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4. Turbo Pumped, High Vacuum Systems

Table of Contents:

1. Introduction
2. Physical Considerations
3. Physical Considerations (Part 2)
4. Turbo Pumped, High Vacuum Systems
5. Surface Treatment

The K950X turbo-pumped system features a multi-change head system for Carbon rod, Carbon fibre and metal evaporation. The unit also allows for Glow Discharge treatment of samples using +/-HT dc supply option.

K950 Carbon Evaporator

Figure 8: K950X

Micrograph of mouse muscle

Figure 9: Micrograph of leg muscle of a mouse, dehydrated in alcohol, frozen fractured, thawed in alcohol, then critical point dried in Emitech K850, resin embedded, rotary Carbon coated, then coated with Platinum

K975X turbo-pumped high-vacuum system, with large 10 inch (250mm) chamber with multi-source supply, and rack out drawer loading system. Also featuring a rotating and tilting stage and planetary stages adjustable under vacuum with accurate external tilt control and a unique anti-stick, constant pressure carbon gun for controlled evaporation, it allows for sequential coatings without breaking vacuum.

K975X Turbo Pumped Evaporation System

Figure 10: K975X

Carbon gun

Figure 11: Anti-stick carbon gun

Evaporation sources

Figure 12: Range of evaporation sources for use in K975X, including Boron Nitride Crucibles



The K975XS is the same unit as the K975X; however, a special loading stage is fitted to allow for 8-inch (200mm) wafers with carbon coating, or other samples up to 5½-inch (140mm) square.

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